About Therma-Wave
Therma-Wave is a company based in Fremont (United States) founded in 1982, and was acquired by KLA Tencor in January 2007. Thermal wave metrology systems for semiconductors are developed. Therma-Wave has completed 1 acquisition, including Sensys Instruments.
Company details
Therma-Wave was established in 1982 in Fremont, United States. Non-contact metrology equipment is manufactured by the company for the semiconductor industry, employing thermal wave technology to enable precise process control. Solutions are provided for wafer inspection and film thickness measurement without physical contact. Operations are centered in the United States, serving global semiconductor fabrication needs through its domain, thermawave.com.
- Headquarters Fremont, United States
- Stage Acquired
- Website thermawave.com
- Acquired by KLA Tencor (Jan 2007)
- InvestorsBain Capital Private Equity
& 2 more
- Investments & Acquisitions
- Acquired by
Investors in Therma-Wave
Therma-Wave has secured backing from 3 investors, including venture fund and institutional investors. Prominent investors backing the company include Bain Capital Private Equity, Sutter Hill Ventures and KLA.
| Investor | Description | Founded Year | Domain | Location |
|---|---|---|---|---|
VC firm investing in the US | shv.com | Palo Alto, United States | ||
Private investment firm managing assets and expanding into equity, credit, and real estate services. | 1984 | baincapitalprivateequity.com | London, United Kingdom | |
KLA Corporation is engaged in providing process control solutions for the electronics industry. | kla-tencor.com | United States |
Investor details for Therma-Wave
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- Complete investor list
- Round participation
- Investor portfolios
- Co-investor network
Verified entity values are shown only after access is granted.
Investments & Acquisitions by Therma-Wave
Therma-Wave has strategically engaged in corporate development activities, having acquired 1 company. Notable acquisitions include Sensys Instruments.
| Company Name | Description | Domain | Location | Founded | Acquired | Amount |
|---|---|---|---|---|---|---|
Deep infiltration stormwater systems are designed, installed, and maintained. | sensys-inst.com | Santa Clara, United States | 1996 | Jan 2002 | •••• |
Complete acquisition details for Therma-Wave
Acquired stakes, deal sources and the complete acquisition history require an active premium plan.
- Acquired stakes
- Deal sources
- Complete history
- Exports
Verified entity values are shown only after access is granted.
Timeline of Therma-Wave
4 dated milestones of Therma-Wave across 25 years, from founding to its latest funding, stage changes and deals.
- Founded Therma-Wave is founded.
- Exit Acquired by Bain Capital Private Equity.
- Acquisition Acquires Sensys Instruments.
- Exit Acquired by KLA Tencor.
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Frequently Asked Questions about Therma-Wave
Therma-Wave was founded in 1982.
Therma-Wave is headquartered in Fremont, United States. It is registered at Fremont, California, United States.
Therma-Wave was established in 1982 in Fremont, United States. Non-contact metrology equipment is manufactured by the company for the semiconductor industry, employing thermal wave technology to enable precise process control. Solutions are provided for wafer inspection and film thickness measurement without physical contact. Operations are centered in the United States, serving global semiconductor fabrication needs through its domain, thermawave.com.
Therma-Wave has made 1 acquisition, including Sensys Instruments.
Therma-Wave has 3 investors. Key investors include Bain Capital Private Equity, Sutter Hill Ventures, and KLA.
Yes. Therma-Wave was acquired by KLA Tencor in January 2007.